The Master-P310APEX polishing equipment is a high-precision polishing solution designed for panel-level products in advanced packaging, glass substrate, and other related fields. Specifically engineered to meet the ultra-planarization and low-defect polishing requirements of 310mm × 310mm panels, the system features a dual-polishing-head and dual-platen configuration. It integrates an in-line cleaning module and a fully automatic loading/unloading system, and is equipped with a flip module to enable double-sided polishing. The equipment supports continuous and stable operation, fully meeting the demands of high-volume automated production.
Multi-zone polishing head
Multiple advanced endpoint detection technology integrated
Dry-in and dry-out
Fully-automatic loading and unloading system
Equipped with a product flipping module, which enables double-side polishing.
Satisfied for automated mass production